Process parameters optimization fot TiN and TiC formation using reactive ion beam assisted deposition

Stringa bibliografica L. Guzman, M. Bonelli, A. Miotello, D. Kothari, "Process parameters optimization fot TiN and TiC formation using reactive ion beam assisted deposition" in SURFACE & COATINGS TECHNOLOGY, v. 100, n. 1-3 (1998), p. 500-502

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