Deposition of hydrogenated amorphous carbon films from CH4/Ar plasmas: Ar dilution effects

Bibliographic citation L. Valentini, J.M. Kenny, G. Mariotto, P. Tosi, "Deposition of hydrogenated amorphous carbon films from CH4/Ar plasmas: Ar dilution effects" in JOURNAL OF MATERIALS SCIENCE, v. 36, n. 21 (2001), p. 5295-5300

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