Vibrational spectroscopy study of Ar+-ion irradiated Si-rich oxide films grown by plasma enhanced chemical vapor deposition

Bibliographic citation G. Mariotto, G. Das, A. Quaranta, G. Della Mea, F. Corni, R. Tonini, "Vibrational spectroscopy study of Ar+-ion irradiated Si-rich oxide films grown by plasma enhanced chemical vapor deposition" in JOURNAL OF APPLIED PHYSICS, v. 97, n. 11 (2005), p. 113502-113512. - URL: http://scitation.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=JAPIAU000097000011113502000001&idtype=cvips&prog=normal&doi=10.1063/1.1900284

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